Frequency domain decomposition of layouts for double dipole lithography.
Kanak AgarwalPublished in: DAC (2010)
Keyphrases
- frequency domain
- spatial domain
- fourier transform
- low frequency
- denoising
- power spectrum
- cross correlation
- frequency analysis
- filter bank
- feature extraction
- bandpass
- wavelet packet
- low pass
- subband
- frequency response
- spectral domain
- fourier domain
- discrete fourier transform
- image processing
- spectrum analysis
- power spectra
- frequency spectrum
- power spectral
- preprocessing
- phase correlation
- facial asymmetry
- mathematical formalism