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Enhancement of simulation-based semiconductor manufacturing forecast quality through hybrid tool down time modeling.
Patrick Preuss
André Naumann
Wolfgang Scholl
Boon-Ping Gan
Peter Lendermann
Published in:
WSC (2014)
Keyphrases
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semiconductor manufacturing
discrete event simulation
process control
modeling tool
higher quality
data sets
image enhancement
database
production system
image analysis
user friendly
data quality
high quality
information systems
early warning
information retrieval
neural network