Fabrication of a new micro bio chip and flow cell cytometry system using Bio-MEMS technology.

Insoo Byun Jooran Yang Sekwang Park

Published in: Microelectron. J. (2008)

Keyphrases

high density
high speed
case study
bio medical
rapid development
data sets
silicon on insulator
low cost
data processing
cost effective
key technologies
computer systems
integrated circuit
molecular level