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Evolution and Optimization of BEOL MOM Capacitors Across Advanced CMOS Nodes.

Jinglin ShiA. SidelnicovKok Wai J. ChewMei See ChinC. SchippelJ. M. M. dos SantosFrank SchlaphofLutz MeinshausenJohn R. LongDavid L. Harame
Published in: ESSDERC (2018)
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