Optimally Scheduling Single-Arm Multicluster Tools for Manufacturing Hybrid-Type Wafers.
GengHong WangQinghua ZhuYan HouYan QiaoNaiQi WuMengChu ZhouPublished in: SMC (2023)
Keyphrases
- semiconductor manufacturing
- scheduling problem
- manufacturing environment
- software tools
- databases
- wafer fabrication
- load balancing
- dynamic scheduling
- real time database systems
- manufacturing systems
- scheduling algorithm
- database
- decision support
- special case
- decision making
- artificial intelligence
- neural network
- real time