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A method to evaluate the influence of different substrate on stress mismatch induced deformation in MEMS accelerometer.
Jun You
Dayu Tian
Chunhua He
Qiancheng Zhao
Zhenchuan Yang
Dacheng Zhang
Guizhen Yan
Published in:
NEMS (2015)
Keyphrases
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computational cost
high accuracy
synthetic data
computational complexity
significant improvement
learning algorithm
preprocessing
experimental evaluation
feature set
detection method
data sets
neural network
prior knowledge
edge detection
support vector machine svm