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A virtual metrology system for semiconductor manufacturing.
Pilsung Kang
Hyoungjoo Lee
Sungzoon Cho
Dongil Kim
Jinwoo Park
Chan-Kyoo Park
Seungyong Doh
Published in:
Expert Syst. Appl. (2009)
Keyphrases
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semiconductor manufacturing
process control
discrete event simulation
virtual environment
production system
augmented reality
information technology
control system
virtual world
virtual reality
information systems
neural network
decision trees
camera calibration
mixed reality