A New Method of Electrostatic Force Modeling for MEMS Sensors and Actuators.
Sazzadur ChowdhuryMajid AhmadiWilliam C. MillerPublished in: ICMENS (2005)
Keyphrases
- high precision
- high accuracy
- neural network
- experimental evaluation
- probabilistic model
- genetic algorithm
- computationally efficient
- synthetic data
- mathematical model
- real time
- preprocessing
- multiresolution
- prior knowledge
- significant improvement
- computational complexity
- classification accuracy
- support vector machine
- detection method
- data fusion
- classification method