A Defect Detection Model for Imbalanced Wafer Image Data Using CAE and Xception.
Jaegyeong ChaSeokju OhDonghyun KimJongpil JeongPublished in: IDSTA (2020)
Keyphrases
- mathematical model
- defect detection
- statistical model
- high level
- objective function
- prior knowledge
- cost function
- probabilistic model
- computational model
- data sets
- theoretical framework
- management system
- similarity measure
- genetic algorithm
- theoretical analysis
- parameter estimation
- input data
- conceptual model
- formal model
- prediction model
- database