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Convex corners undercutting and rhombus compensation in KOH with and without IPA solution on (110) silicon.

Cuiping JiaWei DongCaixia LiuXindong ZhangJingran ZhouZhicheng ZhongHailin XueHuidong ZangBaokun XuWeiyou Chen
Published in: Microelectron. J. (2006)
Keyphrases
  • low cost
  • high speed
  • high density
  • linear equations
  • data sets
  • objective function
  • search algorithm
  • evolutionary algorithm
  • closed form
  • corner detection