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Impact of Chamber/Annealing Temperature on the Endurance Characteristic of Zr: HfO2 Ferroelectric Capacitor.

Yejoo ChoiChangwoo HanJaemin ShinSeungjun MoonJinhong MinHyeonjung ParkDeokjoon EomJehoon LeeChanghwan Shin
Published in: Sensors (2022)
Keyphrases
  • transmission line
  • simulated annealing
  • real world
  • real time
  • machine learning
  • case study
  • three dimensional
  • high speed
  • temperature control