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A Petri Net and Extended Genetic Algorithm Combined Scheduling Method for Wafer Fabrication.

Fei QiaoYumin MaLi LiHong-xia Yu
Published in: IEEE Trans Autom. Sci. Eng. (2013)
Keyphrases
  • petri net
  • petri net model
  • genetic algorithm
  • dynamic programming
  • neural network
  • pattern classification
  • wafer fabrication
  • np hard
  • complex systems
  • fuzzy reasoning
  • fuzzy petri net
  • stochastic petri net