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Backward Simulation: A Customer-Focused Diversification of Fab Simulation Applications in a Highly Automated Semiconductor Production Line.

Wolfgang SchollPatrick PreussChristoph LaroqueMadlene Leißau
Published in: WSC (2023)
Keyphrases
  • production line
  • mathematical model
  • search algorithm
  • simulation model
  • simulation environment
  • database
  • data sets
  • artificial intelligence
  • case study
  • objective function
  • fully automated
  • bi directional