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Toward a Polysilicon-Based Electrostatically Actuated DC MEMS Switch.
Abdurrashid Hassan Shuaibu
Yves Blaquière
Frédéric Nabki
Published in:
NEWCAS (2023)
Keyphrases
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random access memory
design considerations
high speed
low voltage
control scheme
real time
databases
website
video sequences
low cost