Patterned wafer inspection by high resolution spectral estimation techniques.
Babak Hossein KhalajHamid K. AghajanThomas KailathPublished in: Mach. Vis. Appl. (1994)
Keyphrases
- spectral estimation
- high resolution
- sar imaging
- defect detection
- minimum variance
- power spectrum
- super resolution
- signal processing
- high frequency
- synthetic aperture radar
- image reconstruction
- integrated circuit
- image processing
- remote sensing
- fourier transform
- high quality
- sar imagery
- feature extraction
- non stationary
- image analysis
- object recognition
- pattern recognition
- multiscale