A pattern based strategy for using multidimensional sensors in process control.
Daniel SbarbaroP. EspinozaJ. AranedaPublished in: Comput. Chem. Eng. (2003)
Keyphrases
- process control
- control system
- intelligent control
- product quality
- manufacturing process
- real time
- semiconductor manufacturing
- sensor networks
- sensor technology
- sensor data
- data fusion
- control charts
- optimal strategy
- multidimensional data
- sensor fusion
- imaging sensors
- multi sensor
- software development
- high speed
- databases