Simultaneous template optimization and mask assignment for DSA with multiple patterning.

Jian Kuang Junjie Ye Evangeline F. Y. Young

Published in: ASP-DAC (2016)

Keyphrases

global optimization
case study
neural network
optimization algorithm
multi agent
artificial intelligence
databases
website
decision making
multiscale
computer vision
expert systems
simulated annealing
bounding box
optimization process
combining multiple
evolution strategy