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Force optimization of a linear motion type electrostatic microactuator using finite element method (FEM) analysis for high thrust performances.

Md Ghazaly MariamLim Tzi KhangAliza Che AmranSato Kaiji
Published in: ASCC (2015)
Keyphrases
  • finite element method
  • finite element
  • numerical simulations
  • optical flow
  • genetic algorithm
  • optimization algorithm
  • boundary element method
  • image analysis
  • numerical solution