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Simulations-based and solver-based optimization approaches for batch processes in semiconductor manufacturing.
Andreas Klemmt
Sven Horn
Gerald Weigert
Thomas Hielscher
Published in:
WSC (2008)
Keyphrases
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semiconductor manufacturing
optimization approaches
discrete event simulation
optimization methods
process control
mathematical programming
batch processing
production system
batch mode
stage stochastic programs
genetic algorithm
process model
computational models
simulation model