A new method for model based frugal OPC.
Xiaolang YanYe ChenZheng ShiYue MaPublished in: ASP-DAC (2005)
Keyphrases
- main contribution
- detection method
- experimental evaluation
- synthetic data
- high accuracy
- high precision
- statistical model
- cost function
- computational cost
- experimental study
- edge detection
- machine learning
- theoretical analysis
- computationally efficient
- fully automatic
- error rate
- support vector machine svm
- semi supervised
- support vector machine
- computational complexity
- support vector
- feature selection