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Device photolithography: The primary pattern generator part iii-the control system.
Patrick G. Dowd
Morton J. Cowan
Peter E. Rosenfeld
A. Zacharias
Published in:
Bell Syst. Tech. J. (1970)
Keyphrases
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pattern generator
control system
remote control
closed loop
table of contents
manufacturing systems
fuzzy logic
virtual instrument
database management
control strategy
control algorithm
control unit
control method
fuzzy control
humanoid robot
control law
fuzzy controller
real time
process control
data acquisition