Morton J. Cowan

Publication Activity (10 Years)

Years Active: 1970-1970
Publications (10 Years): 0

Publications

Morton J. Cowan, D. R. Herriott, A. M. Johnson, A. Zacharias
Device photolithography: The primary pattern generator part i-optical design. Bell Syst. Tech. J. 49 (9) (1970)
Patrick G. Dowd, Morton J. Cowan, Peter E. Rosenfeld, A. Zacharias
Device photolithography: The primary pattern generator part iii-the control system. Bell Syst. Tech. J. 49 (9) (1970)