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A single-mass self-resonating closed-loop capacitive MEMS accelerometer.
Talha Kose
Yunus Terzioglu
Kivanç Azgin
Tayfun Akin
Published in:
IEEE SENSORS (2016)
Keyphrases
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closed loop
open loop
control system
control scheme
feedback control
control law
parameter identification
pid controller
force control
asymptotic stability
control loop
fuzzy logic
feedback controller