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A single-mass self-resonating closed-loop capacitive MEMS accelerometer.

Talha KoseYunus TerziogluKivanç AzginTayfun Akin
Published in: IEEE SENSORS (2016)
Keyphrases
  • closed loop
  • open loop
  • control system
  • control scheme
  • feedback control
  • control law
  • parameter identification
  • pid controller
  • force control
  • asymptotic stability
  • control loop
  • fuzzy logic
  • feedback controller