Integrated design, fabrication, and experimental study of a parallel micro-nano positioning-vibration isolation stage.
Xiaoqing SunBintang YangYulong GaoYikun YangPublished in: Robotics Comput. Integr. Manuf. (2020)
Keyphrases
- experimental study
- computer architecture
- parallel processing
- experimental evaluation
- design process
- neural network
- initial stages
- high density
- design decisions
- design principles
- computer aided
- knowledge based systems
- high speed
- user interface
- case study
- genetic algorithm
- multiresolution
- integrated circuit
- e learning
- artificial intelligence
- design space
- database
- nano scale