trapping layers formed with low temperature processes on gate-all-around junctionless charge-trapping flash memory devices.
Hsin-Kai FangKuei-Shu Chang-LiaoChia-Hsin ChengPo-Yao LinWen-Hsien HuangChang-Hong ShenJia-Min ShiehPublished in: Microelectron. Reliab. (2018)