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Dummy feature placement for chemical-mechanical polishing uniformity in a shallow trench isolation process.

Ruiqi TianXiaoping TangD. F. Wong
Published in: ISPD (2001)
Keyphrases
  • image processing
  • feature vectors
  • information extraction
  • machine learning
  • artificial intelligence
  • metadata
  • multiresolution
  • image features
  • natural language processing
  • question answering
  • recognition process