A 22-ng/ $\surd$ Hz 17-mW Capacitive MEMS Accelerometer With Electrically Separated Mass Structure and Digital Noise- Reduction Techniques.
Yuki FurubayashiTakashi OshimaTaizo YamawakiKeiki WatanabeKeijiro MoriNaoki MoriAkira MatsumotoYudai KamadaAtsushi IsobeTomonori SekiguchiPublished in: IEEE J. Solid State Circuits (2020)