Sign in
RTD Response Time Estimation in the Presence of Temperature Variations and Its Application to Semiconductor Manufacturing.
Woei Wan Tan
Reginald F. Y. Li
Ai Poh Loh
Weng Khuen Ho
Published in:
IEEE Trans. Instrum. Meas. (2008)
Keyphrases
</>
response time
semiconductor manufacturing
process control
discrete event simulation
quality of service
scheduling algorithm
accurate estimation
prefetching
network latency
query execution
storage space
production system
energy efficiency
database
lower bound
image sequences
artificial intelligence