Reginald F. Y. Li

Publication Activity (10 Years)

Years Active: 2003-2008
Publications (10 Years): 0

Publications

Woei Wan Tan, Reginald F. Y. Li, Ai Poh Loh, Weng Khuen Ho
RTD Response Time Estimation in the Presence of Temperature Variations and Its Application to Semiconductor Manufacturing. IEEE Trans. Instrum. Meas. 57 (2) (2008)
Woei Wan Tan, Reginald F. Y. Li
An in-situ temperature measurement system for DUV lithography. IEEE Trans. Instrum. Meas. 52 (4) (2003)