Megasonic transducer drive utilizing MOSFET DC-to-RF inverter with output power of 600 W at 1 MHz.
Taiju SuzukiHiroaki IkedaHirofumi YoshidaShigenobu ShinoharaPublished in: IEEE Trans. Ind. Electron. (1999)
Keyphrases
- permanent magnet
- power electronics
- fuzzy logic controller
- magnetic field
- output voltage
- single phase
- control algorithm
- control system
- high speed
- pulse width modulation
- fuzzy controller
- rf sputtering
- dc motor
- radio frequency
- electronic circuits
- rule base
- power consumption
- magneto optic
- matlab simulink
- pid controller
- pi controller
- fuzzy control
- active power filter
- low cost
- fuzzy logic
- real time