Neuro-predictive process control using online controller adaptation.
Alexander G. ParlosSanjay ParthasarathyAmir F. AtiyaPublished in: IEEE Trans. Control. Syst. Technol. (2001)
Keyphrases
- process control
- control system
- pi controller
- intelligent control
- product quality
- closed loop
- real time
- semiconductor manufacturing
- online learning
- neural network
- optimal control
- control method
- control scheme
- control strategy
- control algorithm
- control law
- fuzzy logic
- manufacturing process
- controller design
- control charts
- neuro fuzzy
- artificial neural networks
- reinforcement learning
- fuzzy controller
- pid controller
- case based reasoning
- genetic algorithm
- graduate education