Application of MEMS behavioral simulation to Physics of Failure (PoF) modeling.
Petra SchmittFrancis PressecqXavier LafontanQ.-H. DuongPatrick PonsJean Marc NicotCoumar OudéaDaniel EstèveJean-Yves FourniolsHenri CamonPublished in: Microelectron. Reliab. (2003)