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Partial secondary electron-yield NEXAFS spectromicroscopy with an energy-filtered X-PEEM.

Stephen Lynd ChristensenBrian M. HainesUday D. LankeMatthew F. PaigeStephen G. Urquhart
Published in: IBM J. Res. Dev. (2011)
Keyphrases
  • electron microscopy
  • low energy
  • electron microscope
  • x ray
  • three dimensional
  • noise level
  • energy consumption
  • thin film
  • neural network
  • image reconstruction
  • energy efficient