OSS Architecture for Flexible and Efficient Process Control.

Haruo Oishi Tatsuya Nakatani Kenichi Tayama Shiro Ogasawara Tetsuya Yamamura

Published in: NOMS (2006)

Keyphrases

process control
control system
open source
product quality
intelligent control
highly flexible
real time
semiconductor manufacturing
neural network
management system
computationally efficient
manufacturing process