Single Dopant Lithography for the Fabrication of Atomic-scale Devices and Quantum Systems.
Ivo W. RangelowThomas SchenkelArun PersaudZahid DurraniMervyn JonesHans-Georg PietscherFabian DietrichAditya S. TanJaqueline StauffenbergEberhard ManskeThomas FröhlichDimitre KarpuzovPublished in: MIXDES (2024)
Keyphrases
- management system
- processing capabilities
- learning systems
- operating environment
- electronic devices
- case study
- electron beam
- navigation systems
- high speed
- scale space
- computing systems
- integrated circuit
- building blocks
- real time
- distributed systems
- wireless sensor networks
- expert systems
- information systems
- databases