Capacitively Coupled Non-Contact Probing Circuits for Membrane-Based Wafer-Level Simultaneous Testing.
Mutsuo DaitoYoshiro NakataSatoshi SasakiHiroyuki GomyoHideki KusamitsuYoshio KomotoKunihiko IizukaKatsuyuki IkeuchiGil-Su KimMakoto TakamiyaTakayasu SakuraiPublished in: IEEE J. Solid State Circuits (2011)