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Combined experimental and numerical approach to study electro-mechanical resonant phenomena in GaN-on-Si heterostructures.
Florian Peter Pribahsnik
Mirko Bernardoni
Michael Nelhiebel
M. Mataln
A. Lindemann
Published in:
Microelectron. Reliab. (2018)
Keyphrases
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qualitative and quantitative
statistical analysis
artificial intelligence
knowledge base
experimental data
fuzzy logic
simulation model
electro mechanical