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A 1/2-in, 1.3 M-pixel progressive-scan CCD image sensor employing 0.25-μm gap single-layer poly-Si electrodes.

Masayuki FurumiyaKeisuke HatanoYasutaka NakashibaIchiro MurakamiTohru YamadaTakashi NakanoYukiya KawakamiToru KawasakiYasuaki Hokari
Published in: IEEE J. Solid State Circuits (1999)
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