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Fabrication and Evaluation of MEMS Piezoelectric Vibration Sensor with Energy Harvesting Function.
Lan Zhang
Ryohei Takei
Jian Lu
Daiji Noda
Ryo Ohta
Toshihiro Itoh
Takeshi Kobayashi
Published in:
NEMS (2019)
Keyphrases
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sensor networks
integrated circuit
data sets
sensor data
high speed
high voltage
low energy
energy efficiency
multi sensor
energy minimization
fault diagnosis
denoising
metadata
learning algorithm
genetic algorithm
information retrieval
neural network