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Simultaneous flare level and flare variation minimization with dummification in EUVL.

Shao-Yun FangYao-Wen Chang
Published in: DAC (2012)
Keyphrases
  • decision making
  • machine learning
  • wide range
  • case study
  • multiscale
  • pairwise
  • multiresolution
  • convex optimization
  • levels of abstraction
  • minimization problems