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Mechanical Reliability of MEMS-structures under shock load.

Ulrich WagnerJ. FranzM. SchweikerWinfried BernhardRoland Müller-FiedlerBernd MichelOliver Paul
Published in: Microelectron. Reliab. (2001)
Keyphrases
  • load balancing
  • three dimensional
  • image processing
  • database
  • real time
  • decision making