Overlay Error Compensation Using Advanced Process Control With Dynamically Adjusted Proportional-Integral R2R Controller.
Chen-Fu ChienYing-Jen ChenChia-Yu HsuHung-Kai WangPublished in: IEEE Trans Autom. Sci. Eng. (2014)
Keyphrases
- process control
- error compensation
- control system
- proportional integral
- control strategy
- pid controller
- power system
- pi controller
- closed loop
- control method
- control algorithm
- control scheme
- manufacturing process
- controller design
- intelligent control
- fuzzy logic
- real time
- semiconductor manufacturing
- fuzzy controller
- control law
- fuzzy logic controller
- dc motor
- disturbance rejection
- operating conditions
- structured light
- optimal control
- pid control
- neural network controller
- phase shifting
- proportional integral derivative
- neural network
- fuzzy control
- dynamic model
- matlab simulink
- image data
- feature extraction