A Surface Micromachined CMOS MEMS Humidity Sensor.
Jian-Qiu HuangFei LiMin ZhaoKai WangPublished in: Micromachines (2015)
Keyphrases
- analog to digital converter
- image sensor
- three dimensional
- data acquisition
- laser scanner
- low cost
- high speed
- cmos image sensor
- d objects
- power consumption
- surface reconstruction
- low power
- real time
- analog vlsi
- focal plane
- power supply
- monitoring system
- sensor data
- sensor networks
- circuit design
- image sequences
- delay insensitive