Model-based control for semiconductor and advanced materials processing: an overview.
Abbas Emami-NaeiniJon L. EbertRobert L. KosutDick de RooverSarbajit GhosalPublished in: ACC (2004)
Keyphrases
- data acquisition
- production line
- process control
- control system
- control strategy
- control theory
- data driven
- information processing
- semiconductor manufacturing
- database
- control problems
- control strategies
- control method
- optimal control
- robotic systems
- data processing
- computational intelligence
- multi agent systems
- multi agent
- website
- artificial intelligence
- neural network
- databases
- data sets