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Characterization of line edge roughness and line width roughness of nano-scale typical structures.

Zhuangde JiangFengxia ZhaoWeixuan JingPhilip D. PrewettKyle Jiang
Published in: NEMS (2009)
Keyphrases
  • nano scale
  • fractal dimension
  • real time
  • databases
  • real world
  • decision trees
  • three dimensional
  • expert systems
  • multiresolution
  • edge detection
  • medical images
  • cross section
  • curvilinear structures