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Wafer defect pattern recognition by multi-class support vector machines by using a novel defect cluster index.
Li-Chang Chao
Lee-Ing Tong
Published in:
Expert Syst. Appl. (2009)
Keyphrases
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pattern recognition
multi class support vector machines
image processing
clustering algorithm
neural network
semiconductor manufacturing
multi class support vector machine
data sets
machine learning
data points