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Efficient Approach to Failure Response of Process Module in Dual-Arm Cluster Tools With Wafer Residency Time Constraints.
Yan Qiao
SiWei Zhang
Naiqi Wu
MengChu Zhou
ZhiWu Li
Ting Qu
Published in:
IEEE Trans. Syst. Man Cybern. Syst. (2021)
Keyphrases
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process model
data sets
data points
software development
software tools
manufacturing process
information retrieval
evolutionary algorithm
decision support
cost effective
user friendly
constraint programming
integrated circuit