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Run To Run control based on categorical output in semiconductor manufacturing.
El Mostafa El Adel
Guillaume Graton
Mustapha Ouladsine
Jacques Pinaton
Published in:
ICSC (2016)
Keyphrases
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semiconductor manufacturing
process control
control system
control strategy
machine learning
knowledge base
data sets
data mining
computer vision
decision making
decision trees
three dimensional
search algorithm
robotic systems
discrete event simulation