Robust high-gain control of nonlinear reactive sputter processes.

Christian Woelfel Peter Awakowicz Jan Lunze

Published in: CCTA (2017)

Keyphrases

wide range
control method
production processes
tracking control
adaptive neural
high precision
partial occlusion
optimal control
adaptive control
linear systems
robot control
control theory
highly nonlinear
lyapunov function
control system
artificial neural networks
genetic algorithm