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Contactless current and voltage measurements in integrated circuits by using a needle sensor.

M. NeinhüsRainer WeberUlf BehnkeWolfgang MertinErich KubalekR. A. BreilM. DetjeA. Feltz
Published in: Microelectron. Reliab. (2002)
Keyphrases
  • integrated circuit
  • sensor networks
  • low voltage
  • real time
  • neural network
  • smart card
  • sensor measurements
  • high voltage
  • signal processing
  • sensor data
  • electron beam
  • short circuit